Technical Data; Dimensions - Pfeiffer Vacuum TSD 022 Mode D'emploi

8. Technical Data

Pumping Station
Connection nominal diameter
Volume flow rate for
Nitrogen N 2
Helium He
Hydrogen H 2
Working range
from
to
Backing pump volume flow rate
Electrical connection load
Weight
Pumping station components
Turbomolecular Drag Pump
Diaphragm Pump
Electronic Drive Unit
Pumping Station Control Unit
Venting Valve
1) Values in brackets for reduction to DN 40 ISO-KF.
2) Included in the delivery.

8.1. Dimensions

TSD 022
TSH/U 064 D
TSH/U 065 D
22
Unit TSD 022
DN 63 ISO-K
18 (15) 1)
l/s
12 (10) 1)
l/s
9 (7) 1)
l/s
mbar 1000
2 · 10 -7
mbar
m 3 /h
2
kW 0,3
kg 24,5
TPD 022
TMH 064
MZ 2T
TCP 015
TCS 015
—
A
360
375
400
TSH 064 D TSH 064 D
TSU 064 D
DN 40 ISO-KF DN 63 ISO-K
DN 63 CF-F
30 53
40 42
20 31
1000 1000
< 1 · 10 -8 < 1 · 10 -9
2 2
0,3 0,3
25 25/25,2
— —
TMH 064 TMH 065
TMU 064
MZ 2T MZ 2T
TCP 015 TCP 015
TCS 015 TCS 015
TSF 012 2) TSF 012 2)
TSH 065 D TSH 065 D
TSU 065 D
DN 40 ISO-KF DN 63 ISO-K
DN 63 CF-F
30 56
40 48
34 36
1000 1000
< 1 · 10 -8 < 1 · 10 -9
2 2
0,3 0,3/0,35
26 26/26,4
— —
TMH 065
TMU 065
MZ 2T MZ 2T
TCP 015 TCP 015
TCS 015 TCS 015
TSF 012 2) TSF 012 2)